MOLDED BODY PRODUCTION METHOD, MOLDED BODY AND SPUTTERING TARGET
To provide a molded body production method capable of preventing the generation of cracks of a molded body upon CIP and the generation of cracks and in the subsequent post-steps, a molded body, and a sputtering targe.SOLUTION: A molding die has: a bottom face part; side face parts; and a top face pa...
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Zusammenfassung: | To provide a molded body production method capable of preventing the generation of cracks of a molded body upon CIP and the generation of cracks and in the subsequent post-steps, a molded body, and a sputtering targe.SOLUTION: A molding die has: a bottom face part; side face parts; and a top face part, and each of the bottom face part, the side face parts and the top face part is formed by a material in which a resistance with respect to a compressive deformation along a face direction is reduced compared with a bending rigidity. A molded body production method has: a charging step of charging a powder material into a molding die; a vacuum pack step of vacuum-packing the molding die after the charging step so as to be a sealed state; a reinforcement step of, in a state where a reinforcement plate having a bending rigidity higher than the material of the molding material is abutted against the outer bottom face of the bottom face part and the upper face of the top face part in the molding die after the vacuum pack step, pressing the reinforcement plate by a spring under a pressure of 0.004 N/mm2 or more to a pressurizing force in a cold isotropic pressure working method or less; and a pressurization step of pressurizing the molding die in a state of pressed by the spring by a cold isotropic pressure pressurization method.SELECTED DRAWING: Figure 7
【課題】成形体のCIP時の割れの発生、その後の後工程における割れの発生を防止できる成形体の製造方法、成形体及びスパッタリングターゲットを提供する。【解決手段】成形型は、底面部と、側面部と、天面部と、を備え、底面部、側面部及び天面部のそれぞれが曲げ剛性に比して面方向に沿う圧縮変形に対する抵抗が小さい素材により形成されており、成形型内に粉末材料を充填する充填工程と、充填工程後の成形型を真空パックして密封状態とする真空パック工程と、真空パック工程後の成形型の底面部の外底面と天面部の上面とに成形型の素材より曲げ剛性の高い補強板を当接させた状態で、補強板をばねにより、0.004N/mm2以上冷間等方圧加工法の加圧力以下の圧力で押圧する補強工程と、ばねにより押圧された状態の成形型を冷間等方圧加圧法により加圧する加圧工程とを備える。【選択図】図7 |
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