CHARGED PARTICLE BEAM DEVICE

To provide a stage device capable of accurately and quickly positioning a position of a top table relative to a column, and a charged particle beam device having the same.SOLUTION: A charged particle beam device includes a first moving table and a second moving table disposed above the first moving...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KATO TAKANOBU, TAKAHASHI MUNEHIRO, MIZUOCHI MAKI, OGAWA HIRONORI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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