CHARGED PARTICLE BEAM DEVICE
To provide a stage device capable of accurately and quickly positioning a position of a top table relative to a column, and a charged particle beam device having the same.SOLUTION: A charged particle beam device includes a first moving table and a second moving table disposed above the first moving...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng ; jpn |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | To provide a stage device capable of accurately and quickly positioning a position of a top table relative to a column, and a charged particle beam device having the same.SOLUTION: A charged particle beam device includes a first moving table and a second moving table disposed above the first moving table, measures a first relative position between a sample chamber and the first moving table, a second relative position between the sample chamber and the second moving table, and a third relative position between the lens barrel and the sample, and corrects a relative position between the first moving table and the second moving table according to the first relative position and the second relative position.SELECTED DRAWING: Figure 1
【課題】カラムに対するトップテーブルの位置を正確かつ高速に位置決めすることが可能なステージ装置およびそのステージ装置を備えた荷電粒子線装置を提供する。【解決手段】本発明に係る荷電粒子線装置は、第１移動テーブルおよび前記第１移動テーブルの上方に配置された第２移動テーブルを備え、試料室と前記第１移動テーブルとの間の第１相対位置、前記試料室と第２移動テーブルとの間の第２相対位置、および、前記鏡筒と前記試料との間の第３相対位置、を計測し、前記第１相対位置と前記第２相対位置に応じて、前記第１移動テーブルと前記第２移動テーブルとの間の相対位置を補正する。【選択図】図１ |
|---|