DRIVING DEVICE, LITHOGRAPHIC APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

To provide a driving device that is advantageous in energy saving and suppression of failures.SOLUTION: A driving device includes: a power supply unit that supplies electric power to a driving unit containing a motor and a motor driver; a capacitor that can accumulate the electric power from the power supply unit and regenerative electric power from the driving unit; a switching unit that is provided between the power supply unit and the capacitor for switching a state between the power supply unit and the capacitor between a connected state and a non-connected state; and a control unit that controls the switching unit. The control unit predicts a first voltage value required by the motor driver for driving the motor and a second voltage value of the capacitor that varies with driving of the motor on the basis of driving conditions of the motor, and controls the switching by the switching unit on the basis of the first and second voltage values.SELECTED DRAWING: Figure 1 【課題】省エネ化及び故障の抑制の点で有利な駆動装置を提供する。【解決手段】モータ及びモータドライバを含む駆動部に電力を供給する電源部と、前記電源部からの電力及び前記駆動部からの回生電力を蓄電可能なキャパシタと、前記電源部と前記キャパシタとの間に設けられ、前記電源部と前記キャパシタとの間の状態を、接続状態とするか、非接続状態とするか、の切り替えを行うための切替部と、前記切替部を制御する制御部と、を有し、前記制御部は、前記モータの駆動条件に基づいて、前記モータを駆動するために前記モータドライバが必要とする第１電圧値、及び、前記モータの駆動によって変動する前記キャパシタの第２電圧値を予測し、前記第１電圧値及び前記第２電圧値に基づいて、前記切替部による前記切り替えを制御することを特徴とする駆動装置を提供する。【選択図】図１