METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSOR

To provide a technique that can optimize electricity removing processing in processing of a substrate.SOLUTION: A method for processing a substrate of a substrate processor includes the steps of: carrying the substrate from a process module for performing plasma processing and electricity removing p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	UEMATSU HARUYUKI, ABE MASATOSHI, MIURA TOMOHISA, SUGAWARA TAKESHI, UGAJIN HAJIME
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!