SURFACE ACOUSTIC WAVE RESONATOR, METHOD FOR MANUFACTURING THE SAME AND BONDED SUBSTRATE

SURFACE ACOUSTIC WAVE RESONATOR, METHOD FOR MANUFACTURING THE SAME AND BONDED SUBSTRATE

To provide a superior surface acoustic wave resonator.SOLUTION: In s surface acoustic wave resonator of one embodiment, the Euler angles (φ1, θ1, ψ1) of a first crystal substrate satisfy 0°≤φ1≤2°, 123°≤θ1≤128°, 31°≤ψ1≤44°, the Euler angles (φ2, θ2, ψ2) of a second crystal substrate bonded on the fir...

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Bibliographische Detailangaben
Hauptverfasser: YOKOTA HIROAKI, MARUKO TAKUYA, OGAWA KENGO, KAKIO SHOJI, KISHIDA KAZUTO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Zusammenfassung:To provide a superior surface acoustic wave resonator.SOLUTION: In s surface acoustic wave resonator of one embodiment, the Euler angles (φ1, θ1, ψ1) of a first crystal substrate satisfy 0°≤φ1≤2°, 123°≤θ1≤128°, 31°≤ψ1≤44°, the Euler angles (φ2, θ2, ψ2) of a second crystal substrate bonded on the first crystal substrate satisfy 83°≤φ2≤95°, 82°≤θ2≤95°, and 159°≤ψ2≤161°, and the thickness of the second quartz substrate is 0.17 to 0.19 times the wavelength of the surface acoustic wave.SELECTED DRAWING: Figure 1 【課題】優れた弾性表面波共振子を提供すること。【解決手段】一実施形態に係る弾性表面波共振子では、第１の水晶基板のオイラー角（φ１、θ１、ψ１）が、０°≦φ１≦２°、１２３°≦θ１≦１２８°、３１°≦ψ１≦４４°を満たし、第１の水晶基板上に接合された第２の水晶基板のオイラー角（φ２、θ２、ψ２）が、８３°≦φ２≦９５°、８２°≦θ２≦９５°、１５９°≦ψ２≦１６１°を満たし、第２の水晶基板の厚さが、弾性表面波の波長の０．１７～０．１９倍である。【選択図】図１