SURFACE PROPERTY MEASUREMENT DEVICE AND SURFACE PROPERTY MEASUREMENT METHOD

To provide a surface property measurement device and a surface property measurement method that can convert a strain of a reflected image into numbers to quantitatively evaluate the strain.SOLUTION: A surface property measurement device 10 is provided which has an irradiation unit 2 that irradiates a surface to be measured 1 with illumination light L1 having one or more bright areas and dark areas; a light detection unit 5 that focuses on a light source through the surface to be measured 1 to receive reflected light L2 that is reflected on the surface to be measured 1; a first processing unit 6 that, in a light intensity distribution of the reflected light L2 on the surface to be measured 1, determines a plurality of selection points obtained by connecting measurement points of light intensity of the reflected light L2 by using a predetermined light intensity threshold and specifies positions on the surface to be measured 1; a second processing unit 7 that creates a graph obtained by plotting the positions indicating the selection points with a first direction on the surface to be measured 1 as a transverse axis and a second direction orthogonal to the first direction as a vertical axis; a third processing unit 8 that determines a reference line based on a shape of the bright areas of the illumination light L1; and a fourth processing unit 9 that determines the difference between the points plotted in the graph and the reference line and converts a variation of the difference into numbers.SELECTED DRAWING: Figure 1 【課題】反射像の歪みを数値化して定量的に評価することが可能な表面性状測定装置および表面性状測定方法を提供する。【解決手段】被測定面１に、１つ以上の明領域および暗領域を有する照明光Ｌ１を照射する照射部２と、被測定面１を介して光源に焦点を合わせて、被測定面１で反射する反射光Ｌ２を受光する光検出部５と、被測定面１における反射光Ｌ２の光強度分布において、所定の光強度閾値を用いて、反射光Ｌ２の光強度の測定点を結んだ複数の選択点を決め、被測定面上１の位置を特定する第１処理部６と、被測定面１上の第１方向を横軸、第１方向と直交する第２方向を縦軸として、選択点を示す位置をプロットしたグラフを作成する第２処理部７と、照明光Ｌ１の明領域の形状に基づく基準線を求める第３処理部８と、グラフにプロットした点と基準線との差分を求め、差分のばらつきを数値化する第４処理部９と、を有する、表面性状測定装置１０を提供する。【選択図】図１