SURFACE PROPERTY MEASUREMENT DEVICE AND SURFACE PROPERTY MEASUREMENT METHOD
To provide a surface property measurement device and a surface property measurement method that can convert surface properties such as irregularities and waviness, so-called orange peel into numbers.SOLUTION: A surface property measurement device 10 is provided which has: an irradiation unit 2 that...
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Zusammenfassung: | To provide a surface property measurement device and a surface property measurement method that can convert surface properties such as irregularities and waviness, so-called orange peel into numbers.SOLUTION: A surface property measurement device 10 is provided which has: an irradiation unit 2 that irradiates a surface to be measured 1 with illumination light L1 having a bright area and a dark area; a light detection unit 5 that focuses on the surface to be measured 1 to receive reflected light L2 that is reflected on the surface to be measured 1 and has a bright area and a dark area corresponding to the bright area and the dark area of the illumination light L1, and detects a light intensity distribution of the reflected light L2 on the surface to be measured 1; a first processing unit 6 that, in the light intensity distribution of the reflected light L2 on the surface to be measured 1, determines a peak value of light intensity of the bright area or the light intensity of a position separated by a predetermined value from a position indicating the peak value of the light intensity of the bright area; and a second processing unit 7 that converts a variation of the light intensity determined by the first processing unit 6 into numbers.SELECTED DRAWING: Figure 1
【課題】凹凸やうねり等の表面性状、いわゆる、ゆず肌の数値化が可能な表面性状測定装置および表面性状測定方法を提供する。【解決手段】被測定面1に、明領域および暗領域を有する照明光L1を照射する照射部2と、被測定面1に焦点を合わせて、被測定面1で反射し、照明光L1の明領域および暗領域に対応する明領域および暗領域を有する反射光L2を受光し、被測定面1における反射光L2の光強度分布を検出する光検出部5と、被測定面1における反射光L2の光強度分布において、明領域の光強度のピーク値、または明領域の光強度のピーク値を示す位置から所定の値離れた位置の光強度を求める第1処理部6と、第1処理部6で求めた光強度のばらつきを数値化する第2処理部7と、を有する、表面性状測定装置10を提供する。【選択図】図1 |
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