INSPECTION DEVICE

To provide an inspection device which can calculate a deviation amount from a prescribed reference surface of an inspection object surface of an inspection object without having a configuration of detecting a position of the inspection object.SOLUTION: An inspection device 1 comprises: a radiation generator 22; a substrate holding part 24 which holds an inspection object 2; a detector 26; drive parts 16, 18, 20 which change relative positions between the inspection object 2 and the detector 26 held by the radiation generator 22 and the substrate holding part 24; and a control part 10. The control part 10, when the inspection object 2 and the detector 26 held by the radiation generator 22 and the substrate holding part 24 are in prescribed relative positions, detects a deviation amount from a prescribed reference surface of an inspection object surface of the inspection object 2 on the basis of at least one transmission image of the inspection object 2 detected and acquired by the detector 26.SELECTED DRAWING: Figure 6 【課題】被検査体の位置を検出する構成を設けることなく、被検査体の検査対象面の所定の基準面からのずれ量を算出することができる検査装置を提供する。【解決手段】検査装置１は、放射線発生器２２と、被検査体２を保持する基板保持部２４と、検出器２６と、放射線発生器２２と基板保持部２４で保持された被検査体２及び検出器２６との相対位置を変化させる駆動部１６，１８，２０と、制御部１０と、を有し、この制御部１０は、放射線発生器２２と基板保持部２４で保持された被検査体２及び検出器２６とが所定の相対位置にあるときに、検出器２６で検出して取得した少なくとも１枚の被検査体２の透過画像に基づいて被検査体２の検査対象面の所定の基準面からのずれ量を検出する。【選択図】図６