IMAGE ACQUISITION DEVICE, INSPECTION DEVICE, AND IMAGE ACQUISITION METHOD

To suitably acquire frames before and after irradiation of light, without wasting frames.SOLUTION: The present invention comprises a light emission unit for irradiating an object with light at a prescribed timing; a light reception unit for two-dimensionally receiving heat radiation from the object;...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAMATA TERUMI, HASHIGUCHI MASAFUMI, MASUDA KOJI
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To suitably acquire frames before and after irradiation of light, without wasting frames.SOLUTION: The present invention comprises a light emission unit for irradiating an object with light at a prescribed timing; a light reception unit for two-dimensionally receiving heat radiation from the object; and a two-dimensional image acquisition unit for acquiring temperature information on the object as a two-dimensional image from information on a limited region out of the information received by the light reception unit, which is limited to a direction in which sequential read-out is performed from the light reception unit. The timing at which the light emission unit initiates irradiation of light is after an exposure time for the limited region of the P-th frame is finished and before an exposure time for the limited region of the (P+1)-th frame begins. The secondary image acquisition unit acquires information on the limited region of least two frames that include the P-th frame and the (P+q)-th frame (q≥1).SELECTED DRAWING: Figure 7 【課題】フレームを無駄にすることなく、光を照射する前後のフレームを良好に取得する。【解決手段】所定のタイミングで対象物に光を照射する発光部と、前記対象物からの熱輻射を2次元的に受光する受光部と、前記受光部で受光した情報の内、前記受光部から順次読み出される方向に限定された限定領域の情報から、前記対象物の温度情報を2次元画像として取得する2次元画像取得部と、を備え、前記発光部が光を照射開始するタイミングは、P番目のフレームの前記限定領域の露光時間が終了した後、かつ、(P+1)番目のフレームの前記限定領域の露光時間が開始する前であり、前記2次元画像取得部は、P番目のフレームと(P+q)番目(q≧1)のフレームとを含む、少なくとも2フレームの前記限定領域の情報を取得する。【選択図】図7