INSPECTION SYSTEM AND CONTROL METHOD FOR INSPECTION SYSTEM

To provide a system that enables the acquisition of a suitable image with minimal distortion or a highly accurate measurement.SOLUTION: An inspection system for inspecting a subject, including a substrate and a coating layer, has: a transmission part that emits terahertz waves including at least a r...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ITSUJI TAKEAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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