INSPECTION SYSTEM AND CONTROL METHOD FOR INSPECTION SYSTEM
To provide a system that enables the acquisition of a suitable image with minimal distortion or a highly accurate measurement.SOLUTION: An inspection system for inspecting a subject, including a substrate and a coating layer, has: a transmission part that emits terahertz waves including at least a r...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a system that enables the acquisition of a suitable image with minimal distortion or a highly accurate measurement.SOLUTION: An inspection system for inspecting a subject, including a substrate and a coating layer, has: a transmission part that emits terahertz waves including at least a reference pattern to the subject; and a support part that adjusts a relative position of the transmission part and the subject. Furthermore, the inspection system has: a detection part that detects terahertz waves reflected by the subject and acquires a terahertz image; and a determination part that determines whether or not an angle of incidence of the terahertz waves on the subject is a predetermined angle of incidence from the shape of the terahertz image.SELECTED DRAWING: Figure 1
【課題】 歪みの少ない好適な像の取得、あるいは精度の高い計測を可能にするシステムを提供する。【解決手段】 基材と被覆層を含む被写体を検査するための検査システムは、少なくとも基準パターンを含むテラヘルツ波を被写体に発する発信部と、発信部と被写体の相対的な位置を調整する支持部とを有する。さらに、検査システムは、被写体にて反射したテラヘルツ波を検出しテラヘルツ像を取得するための検出部と、テラヘルツ像の形状から被写体へのテラヘルツ波の入射角度が所定の入射角度であるか否かを判定する判定部と、を有する。【選択図】 図１ |
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