MEMS ELEMENT AND MOUNTING STRUCTURE OF THE SAME
To provide a MEMS element that can suppress crawling up of an adhesive member for a wall surface enclosing a back chamber, and to provide a mounting structure of the same.SOLUTION: A MEMS element 2A includes a plurality of side surface scallops 28 stacking on a wall surface 27 of a handle substrate...
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| creator | USUI TAKAHIDE HIEDA YOSHIMASA |
| description | To provide a MEMS element that can suppress crawling up of an adhesive member for a wall surface enclosing a back chamber, and to provide a mounting structure of the same.SOLUTION: A MEMS element 2A includes a plurality of side surface scallops 28 stacking on a wall surface 27 of a handle substrate 21 which encloses a back chamber 26, in a thickness direction of the handle substrate 21, thereby suppressing crawling up of an adhesive member 6 that covers the wall surface 27 at the time of being mounted.SELECTED DRAWING: Figure 1
【課題】バックチャンバーを取り囲む壁面の接着部材の這い上がりを抑制することができるＭＥＭＳ素子およびその実装構造を提供する。【解決手段】ＭＥＭＳ素子２Ａのバックチャンバー２６を取り囲むハンドル基板２１の壁面２７に、このハンドル基板２１の厚さ方向に重なる複数の側面スキャロップ２８を備えることで、実装時に壁面２７を覆う接着部材６の這い上がりを抑制することができる。【選択図】図１ |
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【課題】バックチャンバーを取り囲む壁面の接着部材の這い上がりを抑制することができるＭＥＭＳ素子およびその実装構造を提供する。【解決手段】ＭＥＭＳ素子２Ａのバックチャンバー２６を取り囲むハンドル基板２１の壁面２７に、このハンドル基板２１の厚さ方向に重なる複数の側面スキャロップ２８を備えることで、実装時に壁面２７を覆う接着部材６の這い上がりを抑制することができる。【選択図】図１</description><language>eng ; jpn</language><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230403&DB=EPODOC&CC=JP&NR=2023044851A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76419</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230403&DB=EPODOC&CC=JP&NR=2023044851A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>USUI TAKAHIDE</creatorcontrib><creatorcontrib>HIEDA YOSHIMASA</creatorcontrib><title>MEMS ELEMENT AND MOUNTING STRUCTURE OF THE SAME</title><description>To provide a MEMS element that can suppress crawling up of an adhesive member for a wall surface enclosing a back chamber, and to provide a mounting structure of the same.SOLUTION: A MEMS element 2A includes a plurality of side surface scallops 28 stacking on a wall surface 27 of a handle substrate 21 which encloses a back chamber 26, in a thickness direction of the handle substrate 21, thereby suppressing crawling up of an adhesive member 6 that covers the wall surface 27 at the time of being mounted.SELECTED DRAWING: Figure 1
【課題】バックチャンバーを取り囲む壁面の接着部材の這い上がりを抑制することができるＭＥＭＳ素子およびその実装構造を提供する。【解決手段】ＭＥＭＳ素子２Ａのバックチャンバー２６を取り囲むハンドル基板２１の壁面２７に、このハンドル基板２１の厚さ方向に重なる複数の側面スキャロップ２８を備えることで、実装時に壁面２７を覆う接着部材６の這い上がりを抑制することができる。【選択図】図１</description><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZND3dfUNVnD1cfV19QtRcPRzUfD1D_UL8fRzVwgOCQp1DgkNclXwd1MI8XBVCHb0deVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGRsYGJiYWpoaOxkQpAgBHZCZR</recordid><startdate>20230403</startdate><enddate>20230403</enddate><creator>USUI TAKAHIDE</creator><creator>HIEDA YOSHIMASA</creator><scope>EVB</scope></search><sort><creationdate>20230403</creationdate><title>MEMS ELEMENT AND MOUNTING STRUCTURE OF THE SAME</title><author>USUI TAKAHIDE ; HIEDA YOSHIMASA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2023044851A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2023</creationdate><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>USUI TAKAHIDE</creatorcontrib><creatorcontrib>HIEDA YOSHIMASA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>USUI TAKAHIDE</au><au>HIEDA YOSHIMASA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS ELEMENT AND MOUNTING STRUCTURE OF THE SAME</title><date>2023-04-03</date><risdate>2023</risdate><abstract>To provide a MEMS element that can suppress crawling up of an adhesive member for a wall surface enclosing a back chamber, and to provide a mounting structure of the same.SOLUTION: A MEMS element 2A includes a plurality of side surface scallops 28 stacking on a wall surface 27 of a handle substrate 21 which encloses a back chamber 26, in a thickness direction of the handle substrate 21, thereby suppressing crawling up of an adhesive member 6 that covers the wall surface 27 at the time of being mounted.SELECTED DRAWING: Figure 1
【課題】バックチャンバーを取り囲む壁面の接着部材の這い上がりを抑制することができるＭＥＭＳ素子およびその実装構造を提供する。【解決手段】ＭＥＭＳ素子２Ａのバックチャンバー２６を取り囲むハンドル基板２１の壁面２７に、このハンドル基板２１の厚さ方向に重なる複数の側面スキャロップ２８を備えることで、実装時に壁面２７を覆う接着部材６の這い上がりを抑制することができる。【選択図】図１</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING |
| title | MEMS ELEMENT AND MOUNTING STRUCTURE OF THE SAME |
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