MEMS ELEMENT AND MOUNTING STRUCTURE OF THE SAME

To provide a MEMS element that can suppress crawling up of an adhesive member for a wall surface enclosing a back chamber, and to provide a mounting structure of the same.SOLUTION: A MEMS element 2A includes a plurality of side surface scallops 28 stacking on a wall surface 27 of a handle substrate...

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Hauptverfasser:	USUI TAKAHIDE, HIEDA YOSHIMASA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a MEMS element that can suppress crawling up of an adhesive member for a wall surface enclosing a back chamber, and to provide a mounting structure of the same.SOLUTION: A MEMS element 2A includes a plurality of side surface scallops 28 stacking on a wall surface 27 of a handle substrate 21 which encloses a back chamber 26, in a thickness direction of the handle substrate 21, thereby suppressing crawling up of an adhesive member 6 that covers the wall surface 27 at the time of being mounted.SELECTED DRAWING: Figure 1 【課題】バックチャンバーを取り囲む壁面の接着部材の這い上がりを抑制することができるＭＥＭＳ素子およびその実装構造を提供する。【解決手段】ＭＥＭＳ素子２Ａのバックチャンバー２６を取り囲むハンドル基板２１の壁面２７に、このハンドル基板２１の厚さ方向に重なる複数の側面スキャロップ２８を備えることで、実装時に壁面２７を覆う接着部材６の這い上がりを抑制することができる。【選択図】図１