PLATE-LIKE MEMBER POLISHING METHOD AND APPARATUS FOR THE SAME
To make a polishing head reciprocate in an X-axis direction and a Y-axis direction by an X-Y movement guide mechanism and an eccentric wheel mechanism, polish a polished surface of a plate-like member through cooperation of transfer of a polishing tape, smoothly perform polishing motion of the polis...
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Zusammenfassung: | To make a polishing head reciprocate in an X-axis direction and a Y-axis direction by an X-Y movement guide mechanism and an eccentric wheel mechanism, polish a polished surface of a plate-like member through cooperation of transfer of a polishing tape, smoothly perform polishing motion of the polishing head, and improve polishing accuracy and polishing workability of the plate-like member.SOLUTION: A plate-like member polishing apparatus comprises a holding base A capable of holding a plate-like member W, a polishing head B having a polishing mechanism B1 enabling polishing by a polishing tape T for transferring a polished surface W1 of the plate-like member, a holding part C capable of holding the polishing head, and a polishing motion mechanism D, wherein the polishing motion mechanism D comprises an X-Y movement guide mechanism E comprising an X movable table EX for moving and guiding the polishing head in an X-axis direction the same direction as a transfer direction of the polishing tape, and a Y movable table EY for moving and guiding the polishing head in a Y-axis direction crossing the X-axis direction, and an eccentric wheel mechanism F which can simultaneously reciprocate the polishing head in an X-axis direction the same direction as the transfer direction of the polishing tape and a Y-axis direction crossing the X-axis direction.SELECTED DRAWING: Figure 5
【課題】X-Y移動案内機構及び偏心輪機構により研磨ヘッドはX軸方向及びY軸方向に往復移動可能となり、研磨テープの移送の協働により板状部材の研磨面を研磨することができ、研磨ヘッドの研磨運動を円滑に行うことができ、板状部材の研磨精度及び研磨作業性を向上することができる。【解決手段】板状部材Wを保持可能な保持台Aと、板状部材の研磨面W1を移送する研磨テープTにより研磨可能な研磨機構B1をもつ研磨ヘッドBと、研磨ヘッドを保持可能な保持部Cとからなり、研磨運動機構Dは、研磨ヘッドを研磨テープの移送方向と同方向のX軸方向に移動案内可能なX移動台EX及びこれと交差するY軸方向に移動案内可能なY移動台EYからなるX-Y移動案内機構Eと、研磨ヘッドを研磨テープの移送方向と同方向のX軸方向及びこれと交差するY軸方向に同時に往復移動可能な偏心輪機構Fとからなる。【選択図】図5 |
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