VIBRATION ISOLATOR FOR SUPPORTING PAYLOAD

To provide a vibration isolator that is optimized to prevent leaks in the gas compartment and at the same time does not cause misalignment of the support member.SOLUTION: A vibration isolator (10) comprises: a pressurized gas compartment (24) formed with a rigid base structure (28), where the base structure has an opening (32) covered with a flexible membrane (20) having an inner surface (21) facing into the gas compartment (24) and an outer surface (22) facing in the opposite direction; a support member (12) for supporting the payload, the support member (12) being arranged in contact with the outer surface (22) of the membrane; and a clamping member (62) arranged at the inner surface (21) of the membrane. The support member and the clamping member form a clamping system (66), which includes at least one magnetic element (64) for pressing the membrane against the support member.SELECTED DRAWING: Figure 1 【課題】ガス区画の漏れを防止するよう最適化されると同時に支持部材の位置ずれが生じない防振装置を提供する。【解決手段】防振装置（１０）は、剛性のベース構造（２８）で形成された加圧ガス区画（２４）であり、ベース構造は、ガス区画を向いた内面（２１）及び反対方向を向いた外面（２２）を有する可撓性の膜（２０）で覆われた開口（３２）を有する加圧ガス区画（２４）と、ペイロードを支持する支持部材（１２）であり、膜の外面（２２）と接触するよう配置された支持部材（１２）と、膜の内面（２１）に配置されたクランプ部材（６２）とを備え、支持部材及びクランプ部材は、膜を支持部材に押し付ける少なくとも１つの磁気素子（６４）を含むクランプシステム（６６）を形成する。【選択図】図１