APPARATUS FOR SUPPLYING LIQUID AND APPARATUS FOR TREATING SUBSTRATE

To provide a liquid supplying apparatus capable of minimizing microbubbles that may be generated in a pipe of the liquid supplying apparatus.SOLUTION: The liquid supplying apparatus includes: a pipe 930 for connecting a storage container 910 and a trap tank 920; and a valve 939 mounted on the pipe f...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KIM HAE KYUNG, LEE JUBEOM, PIAO LINFENG, KIM DAE SUNG, JUNG WOO SIN, CHO A RAH, PARK HYUNGMIN, LEE JONGJIN, GOH JUNG SUK
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To provide a liquid supplying apparatus capable of minimizing microbubbles that may be generated in a pipe of the liquid supplying apparatus.SOLUTION: The liquid supplying apparatus includes: a pipe 930 for connecting a storage container 910 and a trap tank 920; and a valve 939 mounted on the pipe for opening and closing a flow path of the pipe, where the valve is mounted closer to the storage container than to the trap tank.SELECTED DRAWING: Figure 10 【課題】液供給装置の配管で発生することがあるマイクロバブルを最小化できる液供給装置を提供する。【解決手段】液供給装置は、貯蔵容器９１０とトラップタンク９２０を連結する配管９３０と配管に設置されて配管の流路を開閉するバルブ９３９を含み、バルブはトラップタンクより貯蔵容器に近く設置される。【選択図】図１０