BUBBLE MEASUREMENT UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND BUBBLE MEASUREMENT METHOD

To provide a bubble measurement unit capable of measuring bubbles included in liquid flowing in a liquid supply unit, a substrate processing apparatus including the same, and a bubble measurement method.SOLUTION: There is provided an apparatus that processes a substrate. The apparatus that processes the substrate includes: a liquid supply unit which supplies liquid to the substrate; a cover made of light-transmissive material which is installed at a component provided for the liquid supply unit and provides an inspection region; and an inspection unit which inspects bubbles included in liquid flowing in the component provided in an inspection region. The inspection unit may include: a light source which irradiates the inspection region with light outside the cover; a light reception part which is located outside the cover and receives light passed through the inspection region; and an inspection part which inspects the bubbles from the light received by the light reception part.SELECTED DRAWING: Figure 9 【課題】液供給ユニットの内部を流動する液に含まれたバブルを測定することができるバブル測定ユニットとこれを含む基板処理装置及びバブル測定方法を提供する。【解決手段】本発明は基板を処理する装置を提供する。基板を処理する装置は基板に対して液を供給する液供給ユニット、前記液供給ユニットに提供された部品に設置され、検査領域を提供する透光性材質のカバー、及び前記検査領域に提供された前記部品の内部を流動する前記液に含まれるバブルを検査する検査ユニットを含み、前記検査ユニットは前記カバーの外側で前記検査領域に向かって光を照射する光源、前記カバーの外側に位置され、前記検査領域を通過した前記光を受光する受光部及び前記受光部で受光した前記光から前記バブルを検査する検査部を含むことができる。【選択図】図９