PROTECTIVE FILM FORMATION DEVICE

To provide a protective film formation device which can form a protective film having a flat surface without exerting a load on an element.SOLUTION: A protective film formation device includes: a resin supply part for supplying a liquid curable resin R to a surface where an element of a substrate is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: NISHIGAKI HISASHI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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