TRANSMISSION TYPE DIFFRACTION ELEMENT, LIGHT SOURCE DEVICE, OPTICAL SYSTEM, ELECTRONIC APPARATUS, AND METHOD FOR MANUFACTURING TRANSMISSION TYPE DIFFRACTION ELEMENT

To prevent a reduction in diffraction efficiency of a transmission type diffraction element.SOLUTION: A transmission type diffraction element has a diffraction optical part that includes organic-inorganic hybrid material, and a layer that is provided on the diffraction optical part. The layer has a...

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Hauptverfasser:	SUGIURA YOSHINORI, WATANABE YO, NAKAYAMA HIROHARU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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Zusammenfassung:	To prevent a reduction in diffraction efficiency of a transmission type diffraction element.SOLUTION: A transmission type diffraction element has a diffraction optical part that includes organic-inorganic hybrid material, and a layer that is provided on the diffraction optical part. The layer has a porous layer including a plurality of inorganic particles. The transmission type diffraction element preferably further includes a substrate on which the diffraction optical part is provided. The organic-inorganic hybrid material preferably includes siloxane resin. The inorganic particles preferably include silicon oxide.SELECTED DRAWING: Figure 3 【課題】透過型回折素子の回折効率の低下を抑制する。【解決手段】透過型回折素子は、有機無機ハイブリッド材料を含む回折光学部と、前記回折光学部の上に設けられた層と、を備えている。前記層は、複数の無機粒子を含む多孔質層を有する。透過型回折素子は、前記回折光学部が設けられる基材を更に備えることが好ましい。前記有機無機ハイブリッド材料は、シロキサン系樹脂を含むことが好ましい。前記各無機粒子は、酸化ケイ素を含むことが好ましい。【選択図】図３