SUBSTRATE PROCESSING DEVICE AND IMAGING METHOD

To provide a substrate processing device and an imaging method for imaging a conveyed object.SOLUTION: A substrate processing device includes a room for housing a boat, a transfer mechanism provided in the room and transferring a substrate, a first camera that captures images of a boat support and the substrate, a support member that passes through an opening formed in the wall surface of the chamber and supports the first camera, and a driving unit that drives the support member to move the first camera between a standby position and a measurement position.SELECTED DRAWING: Figure 13 【課題】搬送物を撮像する基板処理装置及び撮像方法を提供する。【解決手段】ボートを収容する室と、前記室内に設けられ、基板を搬送する移載機構と、前記ボートの支柱及び前記基板を撮像する第１カメラと、前記室の壁面に形成された開口部を挿通し、前記第１カメラを支持する支持部材と、前記支持部材を駆動して、前記第１カメラを待機位置と測定位置との間で移動させる駆動部と、を備える、基板処理装置。【選択図】図１３