INSPECTION METHOD, PROGRAM AND INSPECTION SYSTEM

To provide an inspection method, program and inspection system which can improve accuracy of an inspection for a state of a surface of an object.SOLUTION: An inspection method comprises an acquisition step S11 and an inspection step S12. The acquisition step S11 is the step of acquiring an object im...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AKAHO RINA, MOTOMURA HIDETO, MATSUI YOSHINORI, OSHIMA TAKANOBU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CALCULATING COLORIMETRY COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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