INSPECTION METHOD, PROGRAM AND INSPECTION SYSTEM

To provide an inspection method, program and inspection system which can improve accuracy of an inspection for a state of a surface of an object.SOLUTION: An inspection method comprises an acquisition step S11 and an inspection step S12. The acquisition step S11 is the step of acquiring an object im...

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Bibliographische Detailangaben
Hauptverfasser:	AKAHO RINA, MOTOMURA HIDETO, MATSUI YOSHINORI, OSHIMA TAKANOBU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CALCULATING COLORIMETRY COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	To provide an inspection method, program and inspection system which can improve accuracy of an inspection for a state of a surface of an object.SOLUTION: An inspection method comprises an acquisition step S11 and an inspection step S12. The acquisition step S11 is the step of acquiring an object image about a surface of an object. The inspection step S12 inspects the state of the surface of the object on the basis of the object information including shape information expressing the shape of the frequency distribution of a parameter based on a pixel value obtained from the object image.SELECTED DRAWING: Figure 1 【課題】課題は、対象物の表面の状態の検査の精度を向上できる、検査方法、プログラム、及び、検査システムを提供することである。【解決手段】検査方法は、取得ステップＳ１１と、検査ステップＳ１２とを含む。取得ステップＳ１１は、対象物の表面に関する対象画像を取得するステップである。検査ステップＳ１２は、対象画像から得られる、画素値に基づくパラメータの度数分布の形状を表す形状情報を含む対象情報に基づいて、対象物の表面の状態の検査をする。【選択図】図１