CLEANING BRUSH, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

To provide a technique for enhancing the removal efficiency of particles with a cleaning brush.SOLUTION: A cleaning brush cleans a chucking surface of a chuck. The cleaning brush includes a brush base linearly extending radially to an outside in a radial direction from a rotation center line of the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KODAMA MUNEHISA, WAKAMATSU TAKAAKI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:To provide a technique for enhancing the removal efficiency of particles with a cleaning brush.SOLUTION: A cleaning brush cleans a chucking surface of a chuck. The cleaning brush includes a brush base linearly extending radially to an outside in a radial direction from a rotation center line of the chuck, and a plurality of contact portions which protrudes from the brush base and contacts the suction surface. When viewed in a direction orthogonal to the suction surface, a plurality of rows each including the plurality of contact portions arranged at intervals in a first direction, is provided at intervals in a second direction intersecting the first direction. The second direction is a longitudinal direction of the brush base. In each of the rows, at least two contact portions are of different types.SELECTED DRAWING: Figure 6 【課題】洗浄ブラシによるパーティクルの除去効率を向上する、技術を提供する。【解決手段】洗浄ブラシは、チャックの吸着面を洗浄する。前記洗浄ブラシは、前記チャックの回転中心線から径方向外側に直線状に延びるブラシ台と、前記ブラシ台から突出し、前記吸着面に接触する複数の接触部と、を備える。前記吸着面に直交する方向から見たときに、第1方向に間隔をおいて並ぶ複数の前記接触部からなる列が、前記第1方向に交わる第2方向に間隔をおいて複数設けられる。前記第2方向は前記ブラシ台の長手方向である。各前記列において、少なくとも2つの前記接触部の種類が異なる。【選択図】図6