INSPECTION EQUIPMENT OF SEMICONDUCTOR DEVICE AND INSPECTION METHOD

To provide an inspection equipment and an inspection method for semiconductor devices capable of detecting the location of defective parts with high accuracy.SOLUTION: An inspection equipment for a semiconductor device, comprises: a light source 6 that forms irradiation traces on a sample 30 by irradiating light onto the sample 30; a voltage application unit 7 that makes the irradiation traces emit light by applying voltage to the sample 30 and makes defective parts of the inspection target emit light by applying voltage to the inspection target; a first moving unit 7 that moves the inspection target; a light detection unit 9 that detects light emission from the irradiation traces; and a second moving unit 10 that moves the light detection unit 9.SELECTED DRAWING: Figure 1 【課題】不良箇所の位置を高精度に検出することが可能な半導体装置の検査装置および検査方法を提供する。【解決手段】半導体装置の検査装置であって、試料３０に光を照射することにより試料３０に照射痕を形成する光源６と、試料３０に電圧を印加することにより照射痕を発光させ、検査対象に電圧を印加することにより検査対象の不良箇所を発光させる電圧印加部７と、検査対象を移動させる第１移動部７と、照射痕からの発光を検出する光検出部９と、光検出部９を移動させる第２移動部１０と、を備える。【選択図】図１