ANALYZER, METHOD FOR ANALYSIS, AND PROGRAM

To precisely analyze defects of a semiconductor device.SOLUTION: An analyzer includes: an image acquisition unit for acquiring an image taken by a semiconductor device; a defect information acquisition unit for acquiring defect information based on a defective part in the image; a brightness informa...

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Bibliographische Detailangaben
Hauptverfasser:	YAGI NATSUMI, TAKAHASHI YOSUKE, ISHIKAWA NORIAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	To precisely analyze defects of a semiconductor device.SOLUTION: An analyzer includes: an image acquisition unit for acquiring an image taken by a semiconductor device; a defect information acquisition unit for acquiring defect information based on a defective part in the image; a brightness information acquisition unit for acquiring brightness information of at least a part of the region of the image; and an output unit for outputting the defect information and the brightness information in relation to each other. The defect information acquisition unit acquires defect information including a classification result of classification of each defective part according to a defective mode. The output unit may display the defect information and the brightness information together.SELECTED DRAWING: Figure 1 【課題】半導体装置の欠陥を精度よく解析する。【解決手段】半導体装置を撮影した画像を取得する画像取得部と、画像に含まれる欠陥部分に基づく欠陥情報を取得する欠陥情報取得部と、画像の少なくとも一部の領域の明度情報を取得する明度情報取得部と、欠陥情報と明度情報とを対応付けて出力する出力部とを備える解析装置を提供する。欠陥情報取得部は、それぞれの欠陥部分を欠陥モード毎に分類した分類結果を含む欠陥情報を取得し、出力部は、欠陥情報と明度情報とを合わせて表示してよい。【選択図】図１