MEMS DEVICE
To provide a MEMS device in which peeling of a reinforcing film is suppressed.SOLUTION: A MEMS device includes a vibrator 220 including a piezoelectric element that converts pressure into an electrical signal, and a reinforcing film 260 for reinforcing the strength of the vibrator. A groove portion...
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| creator | JOYA TOMOYA KATAUE TAKAHARU ENOMOTO TETSUYA USUI TAKAHIDE MASUMOTO NAOMI YAMADA HIDEO OHARA YUKI KOUCHI HIROYUKI |
| description | To provide a MEMS device in which peeling of a reinforcing film is suppressed.SOLUTION: A MEMS device includes a vibrator 220 including a piezoelectric element that converts pressure into an electrical signal, and a reinforcing film 260 for reinforcing the strength of the vibrator. A groove portion 270 in which a part of the reinforcing film is provided is formed in the vibrator.SELECTED DRAWING: Figure 3
【課題】補強膜が剥がれることの抑制されたＭＥＭＳデバイスを提供する。【解決手段】ＭＥＭＳデバイスは、圧力を電気信号に変換する圧電素子を含む振動子２２０と、振動子の強度を補強するための補強膜２６０と、を有する。振動子には補強膜の一部の設けられる溝部２７０が形成されている。【選択図】図３ |
| format | Patent |
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【課題】補強膜が剥がれることの抑制されたＭＥＭＳデバイスを提供する。【解決手段】ＭＥＭＳデバイスは、圧力を電気信号に変換する圧電素子を含む振動子２２０と、振動子の強度を補強するための補強膜２６０と、を有する。振動子には補強膜の一部の設けられる溝部２７０が形成されている。【選択図】図３</description><language>eng ; jpn</language><subject>BASIC ELECTRONIC CIRCUITRY ; DEAF-AID SETS ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRICITY ; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS ; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PUBLIC ADDRESS SYSTEMS ; RESONATORS ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230110&DB=EPODOC&CC=JP&NR=2023002319A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230110&DB=EPODOC&CC=JP&NR=2023002319A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JOYA TOMOYA</creatorcontrib><creatorcontrib>KATAUE TAKAHARU</creatorcontrib><creatorcontrib>ENOMOTO TETSUYA</creatorcontrib><creatorcontrib>USUI TAKAHIDE</creatorcontrib><creatorcontrib>MASUMOTO NAOMI</creatorcontrib><creatorcontrib>YAMADA HIDEO</creatorcontrib><creatorcontrib>OHARA YUKI</creatorcontrib><creatorcontrib>KOUCHI HIROYUKI</creatorcontrib><title>MEMS DEVICE</title><description>To provide a MEMS device in which peeling of a reinforcing film is suppressed.SOLUTION: A MEMS device includes a vibrator 220 including a piezoelectric element that converts pressure into an electrical signal, and a reinforcing film 260 for reinforcing the strength of the vibrator. A groove portion 270 in which a part of the reinforcing film is provided is formed in the vibrator.SELECTED DRAWING: Figure 3
【課題】補強膜が剥がれることの抑制されたＭＥＭＳデバイスを提供する。【解決手段】ＭＥＭＳデバイスは、圧力を電気信号に変換する圧電素子を含む振動子２２０と、振動子の強度を補強するための補強膜２６０と、を有する。振動子には補強膜の一部の設けられる溝部２７０が形成されている。【選択図】図３</description><subject>BASIC ELECTRONIC CIRCUITRY</subject><subject>DEAF-AID SETS</subject><subject>ELECTRIC COMMUNICATION TECHNIQUE</subject><subject>ELECTRICITY</subject><subject>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</subject><subject>LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PUBLIC ADDRESS SYSTEMS</subject><subject>RESONATORS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZOD2dfUNVnBxDfN0duVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGRsYGQGxo6WhMlCIAm1QcVA</recordid><startdate>20230110</startdate><enddate>20230110</enddate><creator>JOYA TOMOYA</creator><creator>KATAUE TAKAHARU</creator><creator>ENOMOTO TETSUYA</creator><creator>USUI TAKAHIDE</creator><creator>MASUMOTO NAOMI</creator><creator>YAMADA HIDEO</creator><creator>OHARA YUKI</creator><creator>KOUCHI HIROYUKI</creator><scope>EVB</scope></search><sort><creationdate>20230110</creationdate><title>MEMS DEVICE</title><author>JOYA TOMOYA ; KATAUE TAKAHARU ; ENOMOTO TETSUYA ; USUI TAKAHIDE ; MASUMOTO NAOMI ; YAMADA HIDEO ; OHARA YUKI ; KOUCHI HIROYUKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2023002319A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2023</creationdate><topic>BASIC ELECTRONIC CIRCUITRY</topic><topic>DEAF-AID SETS</topic><topic>ELECTRIC COMMUNICATION TECHNIQUE</topic><topic>ELECTRICITY</topic><topic>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</topic><topic>LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PUBLIC ADDRESS SYSTEMS</topic><topic>RESONATORS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>JOYA TOMOYA</creatorcontrib><creatorcontrib>KATAUE TAKAHARU</creatorcontrib><creatorcontrib>ENOMOTO TETSUYA</creatorcontrib><creatorcontrib>USUI TAKAHIDE</creatorcontrib><creatorcontrib>MASUMOTO NAOMI</creatorcontrib><creatorcontrib>YAMADA HIDEO</creatorcontrib><creatorcontrib>OHARA YUKI</creatorcontrib><creatorcontrib>KOUCHI HIROYUKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>JOYA TOMOYA</au><au>KATAUE TAKAHARU</au><au>ENOMOTO TETSUYA</au><au>USUI TAKAHIDE</au><au>MASUMOTO NAOMI</au><au>YAMADA HIDEO</au><au>OHARA YUKI</au><au>KOUCHI HIROYUKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS DEVICE</title><date>2023-01-10</date><risdate>2023</risdate><abstract>To provide a MEMS device in which peeling of a reinforcing film is suppressed.SOLUTION: A MEMS device includes a vibrator 220 including a piezoelectric element that converts pressure into an electrical signal, and a reinforcing film 260 for reinforcing the strength of the vibrator. A groove portion 270 in which a part of the reinforcing film is provided is formed in the vibrator.SELECTED DRAWING: Figure 3
【課題】補強膜が剥がれることの抑制されたＭＥＭＳデバイスを提供する。【解決手段】ＭＥＭＳデバイスは、圧力を電気信号に変換する圧電素子を含む振動子２２０と、振動子の強度を補強するための補強膜２６０と、を有する。振動子には補強膜の一部の設けられる溝部２７０が形成されている。【選択図】図３</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; jpn |
| recordid | cdi_epo_espacenet_JP2023002319A |
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| subjects | BASIC ELECTRONIC CIRCUITRY DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS RESONATORS TRANSPORTING |
| title | MEMS DEVICE |
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