MEMS DEVICE

To provide a MEMS device in which peeling of a reinforcing film is suppressed.SOLUTION: A MEMS device includes a vibrator 220 including a piezoelectric element that converts pressure into an electrical signal, and a reinforcing film 260 for reinforcing the strength of the vibrator. A groove portion...

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Bibliographische Detailangaben
Hauptverfasser:	JOYA TOMOYA, KATAUE TAKAHARU, ENOMOTO TETSUYA, USUI TAKAHIDE, MASUMOTO NAOMI, YAMADA HIDEO, OHARA YUKI, KOUCHI HIROYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRONIC CIRCUITRY DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS RESONATORS TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a MEMS device in which peeling of a reinforcing film is suppressed.SOLUTION: A MEMS device includes a vibrator 220 including a piezoelectric element that converts pressure into an electrical signal, and a reinforcing film 260 for reinforcing the strength of the vibrator. A groove portion 270 in which a part of the reinforcing film is provided is formed in the vibrator.SELECTED DRAWING: Figure 3 【課題】補強膜が剥がれることの抑制されたＭＥＭＳデバイスを提供する。【解決手段】ＭＥＭＳデバイスは、圧力を電気信号に変換する圧電素子を含む振動子２２０と、振動子の強度を補強するための補強膜２６０と、を有する。振動子には補強膜の一部の設けられる溝部２７０が形成されている。【選択図】図３