ELECTRONIC COMPONENT AND METHOD FOR MANUFACTURING THE SAME
To provide an electronic component capable of suppressing airtight reduction, and a method for manufacturing the same.SOLUTION: An elastic wave device 100 includes: a support substrate 10; an elastic wave element 70 provided on the support substrate 10; a frame 40 provided on the support substrate 1...
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Zusammenfassung: | To provide an electronic component capable of suppressing airtight reduction, and a method for manufacturing the same.SOLUTION: An elastic wave device 100 includes: a support substrate 10; an elastic wave element 70 provided on the support substrate 10; a frame 40 provided on the support substrate 10 so as to surround the elastic wave element 70 in a plan view; a lid 30 provided on the frame 40 so as to sandwich an air-space 20 with the support substrate 10 and for sealing the elastic wave element 70 in the air-space 20; and a protective layer 60 provided to cover a side surface 45 on the side opposite to the air-space 20 of the frame 40 and including an element constituting the support substrate 10 excluding oxygen and carbon.SELECTED DRAWING: Figure 2
【課題】気密性の低下を抑制することが可能な電子部品および電子部品の製造方法を提供すること。【解決手段】弾性波デバイス100は、支持基板10と、支持基板10上に設けられる弾性波素子70と、平面視して弾性波素子70を囲んで支持基板10上に設けられる枠体40と、支持基板10とで空隙20を挟んで枠体40上に設けられ、空隙20内に弾性波素子70を封止するリッド30と、枠体40の空隙20とは反対側の側面45を覆って設けられ、支持基板10を構成する元素であり酸素および炭素以外である元素を含む保護層60とを備える。【選択図】図2 |
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