CONVEYANCE DEVICE AND FILM DEPOSITION DEVICE

To reduce influence of deformation of a chamber for conveying accuracy of conveying objects.SOLUTION: A conveyance device comprises: a chamber forming a conveyance space in which vacuum is maintained; conveyance means conveying a conveying object in a conveying direction in the chamber; restriction means restricting a position in a width direction of the conveying object with respect to the conveying direction; position changing means capable of changing the position by moving the restriction means in the width direction; reference means disposed in the chamber and becoming a reference of the position in the width direction of the restriction means; and support means supporting the reference means. The support means comprises: a stand part that is disposed in the chamber by being separated from the chamber, and on which the reference means is loaded; a base part disposed outside the chamber by being separated from the chamber; and a connection part connecting the stand part and the base part through an opening formed on a wall part of the chamber.SELECTED DRAWING: Figure 5 【課題】搬送対象物の搬送精度に対するチャンバの変形の影響を低減する。【解決手段】真空に維持される搬送空間を形成するチャンバと、前記チャンバ内で搬送対象物を搬送方向に搬送する搬送手段と、前記搬送方向に対する前記搬送対象物の幅方向の位置を規制する規制手段と、前記規制手段を前記幅方向に移動してその位置を変更可能な位置変更手段と、前記チャンバ内に配置され、前記規制手段の前記幅方向の位置の基準となる基準手段と、前記基準手段を支持する支持手段と、を備え、前記支持手段は、前記チャンバ内に前記チャンバと分離して配置され、前記基準手段が搭載される架台部と、前記チャンバ外に前記チャンバと分離して配置されたベース部と、前記チャンバの壁部に形成した開口部を通って前記架台部と前記ベース部とを接続する接続部と、を備える。【選択図】図５