CALIBRATION JIG, CALIBRATION METHOD, AND MEASURING METHOD

To provide a calibration jig capable of precisely performing orientation calibration of optical interferometers.SOLUTION: The calibration jig is used for the calibration of an optical interferometer that irradiates measurement light toward an object to be measured on the circumference of a roller. The calibration jig includes: a cylindrical surface along the circumference of the roller; a main plane that is arranged to be parallel to the central axis of the cylindrical surface on the opposite side of the cylindrical surface and measurement light is emitted thereto; and two vertices located the first distance away from the main plane. The cylindrical surface has a shape in which the angle between a straight line passing through a point on the cylindrical surface and perpendicular to the central axis of the cylindrical surface and a straight line passing through a point and perpendicular to the main plane is a predetermined angle.SELECTED DRAWING: Figure 1 【課題】光干渉測定装置の向きの校正を高精度に行うことができる校正治具を提供すること。【解決手段】ローラの周面上の被測定物に向けて測定光を照射する光干渉測定装置の校正に用いられる校正治具であって、ローラの周面に沿う円筒面と、円筒面と反対側に円筒面の中心軸に対して平行に設けられ、測定光が照射される主平面と、主平面から第１距離離れて配置されている２つの頂点と、を備え、円筒面は、円筒面上のある１点を通り且つ円筒面の中心軸に直交する直線と、ある１点を通り且つ主平面に直交する直線とのなす角度が、予め定められた角度になる形状である。【選択図】図１