REFLECTION TYPE ENCODER SCALE AND ENCODER SCALE UNIT

To obtain a reflection type encoder scale that is easy to manufacture and shows highly accurate pattern width accuracy.SOLUTION: A reflection type encoder scale has a low reflection unit formed by plating processing using a mask 70 having: a resist pattern unit 72 including a plurality of linear uni...

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Bibliographische Detailangaben
1. Verfasser: ARAKI SHINJI
Format: Patent
Sprache:eng ; jpn
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