HIGH-FREQUENCY GROUNDING DEVICE AND VACUUM VALVE HAVING HIGH-FREQUENCY GROUNDING DEVICE

To provide an improved high-frequency grounding device for a vacuum valve of a vacuum chamber system, for avoiding undesired plasma discharges in the vacuum chamber system.SOLUTION: A high-frequency grounding device (40) for use with a vacuum valve has a grounding strap (42) having a first end (41)...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	ADRIAN WEITNAUER, ARTHUR BUECHEL
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ACTUATING-FLOATS BASIC ELECTRIC ELEMENTS BLASTING COCKS CURRENT COLLECTORS DEVICES FOR VENTING OR AERATING ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING LINE CONNECTORS MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!