LIGHT DEFLECTOR
To provide a light deflector that has high stiffness and cannot be damaged easily even by miniaturization and thinning.SOLUTION: A light deflector 2 includes: a mirror part 9 for reflecting light; a movable frame 8 provided so as to surround the mirror part 9; a pair of torsion bars 13a, 13b in whic...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a light deflector that has high stiffness and cannot be damaged easily even by miniaturization and thinning.SOLUTION: A light deflector 2 includes: a mirror part 9 for reflecting light; a movable frame 8 provided so as to surround the mirror part 9; a pair of torsion bars 13a, 13b in which each of one end sections on a Y axis is connected to the mirror part 9 and each of the other end sections is connected to the movable frame 8; and semi-annular piezoelectric actuators 10a, 10b that are provided on the movable frame 8 and reciprocatively rotate the torsion bars 13a, 13b around the Y axis. The torsion bars 13a, 13b are in a constricted shape in which the breadth of both the ends is the widest and becomes narrower gradually toward the center in the longitudinal direction.SELECTED DRAWING: Figure 2
【課題】剛性が高く、小型化、薄型化しても破損し難い光偏向器を提供する。【解決手段】光偏向器2は、光を反射するミラー部9と、ミラー部9を包囲するように設けられた可動枠8と、Y軸線上で各々の一端部がミラー部9と結合され、各々の他端部が可動枠8と結合される1対のトーションバー13a,13bと、可動枠8上に設けられ、トーションバー13a,13bをY軸線の周りに往復回動させる半環状圧電アクチュエータ10a,10bを備えている。トーションバー13a,13bは、両端部の横幅が最も広く、長さ方向の中心部に向かって徐々に横幅が狭くなるくびれ形状を有している。【選択図】図2 |
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