VACUUM DRYER, VACUUM DRYING METHOD, AND METHOD FOR SHORTENING THE TIME FOR VACUUM DRYING PROCESS

To shorten the time for posttreatment steps in a vacuum drying process, thus shortening the total time for the whole vacuum drying process.SOLUTION: A vacuum dryer dries a solution on a substrate under reduced pressure. The vacuum dryer has: a treatment vessel that can be decompressed and houses the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OIKAWA JUNJI, NASU TOSHIFUMI, HAYASHI TERUYUKI, UEDA TOSHIHIKO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES WEAPONS
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