VACUUM DRYER, VACUUM DRYING METHOD, AND METHOD FOR SHORTENING THE TIME FOR VACUUM DRYING PROCESS

To shorten the time for posttreatment steps in a vacuum drying process, thus shortening the total time for the whole vacuum drying process.SOLUTION: A vacuum dryer dries a solution on a substrate under reduced pressure. The vacuum dryer has: a treatment vessel that can be decompressed and houses the substrate; a mounting table that is provided in the treatment vessel and allows the substrate to be mounted thereon; a solvent trap that traps a solvent in the solution having been vaporized from the substrate upon vacuum drying and released into the treatment vessel; and a cooler that cools the solvent trap having showed an increased temperature upon canceling of the reduced pressure state within the treatment vessel.SELECTED DRAWING: Figure 14 【課題】減圧乾燥処理における後処理工程の所要時間を短縮し、減圧乾燥処理全体の所要時間を短縮する。【解決手段】基板上の溶液を減圧状態で乾燥させる減圧乾燥装置であって、減圧可能に構成され、前記基板を収容する処理容器と、前記処理容器内に設けられ、前記基板が載置される載置台と、減圧乾燥処理に伴い前記基板から気化し前記処理容器内に放出された前記溶液中の溶媒を捕集する溶媒捕集部と、前記処理容器内の減圧状態を解除した際に昇温した前記溶媒捕集部を冷却する冷却部と、を備える。【選択図】図１４