ADJUSTMENT METHOD OF LASER PROCESSING DEVICE AND LASER PROCESSING DEVICE

To provide an adjustment method of a laser processing device that can properly correct aberration of a light collector constituting an optical system of laser irradiation means.SOLUTION: The adjustment method of a laser processing device is configured to include an imaging step of making imaging mea...

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Hauptverfasser:	AHATA JUN, ICHINOMIYA YUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	To provide an adjustment method of a laser processing device that can properly correct aberration of a light collector constituting an optical system of laser irradiation means.SOLUTION: The adjustment method of a laser processing device is configured to include an imaging step of making imaging means image, and an aberration correcting step of comparing a desired positional relation as a reference for adjustment in a spatial light modulator adjustment step with a positional relation between a plurality of machining traces imaged in the imaging step and correcting aberration of a light collector by adjusting a spatial light modulator so that the positional relation between the machining traces matches the desired positional relation.SELECTED DRAWING: Figure 2 【課題】レーザー照射手段の光学系を構成する集光器の収差を適切に補正することができるレーザー加工装置の調整方法を提供する。【解決手段】撮像手段によって撮像する撮像工程と、空間光変調器調整工程において調整の基準となる所望の位置関係と撮像工程において撮像された複数の加工痕の位置関係とを比較して、該加工痕の位置関係が該所望の位置関係になるように該空間光変調器を調整して集光器の収差を補正する収差補正工程と、を含み、構成される。【選択図】図２