OPTICAL MEASURING DEVICE, MOUNTING BOARD ASSEMBLY EQUIPMENT, AND MOUNTING BOARD ASSEMBLY METHOD

To provide an optical measuring device capable of measuring three different tilt angles of a micro-sized object to be measured.SOLUTION: The optical measuring device includes: a laser source that emits a beam of first light; an imaging unit that emits a beam of second light having a wavelength different from that of the first light; a separation unit that guides the first light and the second light to the object to be measured and separates the reflected light from the object to be measured into first reflected light based on the first light and into second reflected light based on the second light; a light-receiving element that receives the first reflected light separated by the separation unit; and a calculation unit that calculates the pitching angle and the yaw angle of the object to be measured based on the light reception result by the light-receiving element. The imaging unit images the object to be measured by receiving the second reflected light separated by the separation unit. The calculation unit calculates the rolling angle of the object to be measured based on the imaging result by the imaging unit.SELECTED DRAWING: Figure 1 【課題】微小サイズの被測定物の３種類の傾き角を測定することができる光学測定装置を提供する。【解決手段】光学測定装置は、第１の光を出射するレーザ光源と、前記第１の光が有する波長とは異なる波長を有する第２の光を出射する撮像部と、前記第１の光および前記第２の光を被測定物に導くとともに、前記被測定物からの反射光を、前記第１の光に基づく第１の反射光と、前記第２の光に基づく第２の反射光とに分離する分離部と、前記分離部によって分離された前記第１の反射光を受光する受光素子と、前記受光素子による受光結果に基づいて、前記被測定物のピッチング角およびヨーイング角を算出する算出部と、を備え、前記撮像部は、前記分離部によって分離された前記第２の反射光を受光することで前記被測定物を撮像し、前記算出部は、前記撮像部による撮像結果に基づいて前記被測定物のローリング角を算出する。【選択図】図１