RESIN COATING METHOD AND RESIN COATING DEVICE
To properly cure the entire liquid resin supplied to the surface of a substrate to coat the surface of the substrate with a resin.SOLUTION: A resin coating method for coating a resin on one surface of a substrate includes a liquid resin supplying step of supplying a liquid resin that is hardened by...
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Zusammenfassung: | To properly cure the entire liquid resin supplied to the surface of a substrate to coat the surface of the substrate with a resin.SOLUTION: A resin coating method for coating a resin on one surface of a substrate includes a liquid resin supplying step of supplying a liquid resin that is hardened by being irradiated with ultraviolet rays onto one surface of the substrate, a pressing step of covering the liquid resin supplied to the one surface of the substrate with a cover film and spreading the liquid resin with a flat pressing surface through the cover film, a first ultraviolet irradiation step of irradiating the spread liquid resin with ultraviolet rays, a second ultraviolet irradiation step of locally irradiating the liquid resin with ultraviolet rays along the outer periphery of the substrate before or after the first ultraviolet irradiation step, and a cutting step of cutting the cover film and the liquid resin along the outer periphery of the substrate with a cutter.SELECTED DRAWING: Figure 4
【課題】基板の表面に供給された液状樹脂を全体で適切に硬化して基板の表面に樹脂を被覆する。【解決手段】基板の一方の面に樹脂を被覆する樹脂被覆方法であって、紫外線が照射されることで硬化する液状樹脂を該基板の一方の面に供給する液状樹脂供給ステップと、該基板の該一方の面に供給された該液状樹脂をカバーフィルムで覆い、該カバーフィルムを介して平坦な押圧面で該液状樹脂を押し広げる押圧ステップと、押し広げられた該液状樹脂に紫外線を照射する第1の紫外線照射ステップと、該第1の紫外線照射ステップの前又は後に、該基板の外周に沿って該液状樹脂に局所的に紫外線を照射する第2の紫外線照射ステップと、該基板の該外周に沿ってカッターで該カバーフィルム及び該液状樹脂を切断する切断ステップと、を備える。【選択図】図4 |
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