SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING DEVICE PROVIDED WITH THE SAME

To provide a substrate transfer device and a substrate processing device provided with the same to sense end-effector droop.SOLUTION: A substrate transfer device includes an end effector extending in a first direction and supporting a substrate, an end effector hand to which one side of the end effe...

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Bibliographische Detailangaben
Hauptverfasser:	SONG BYOUNG-GYU, KO HYEONG SIK, BAE HYEONG HWAN, JUN-JIN HYON
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a substrate transfer device and a substrate processing device provided with the same to sense end-effector droop.SOLUTION: A substrate transfer device includes an end effector extending in a first direction and supporting a substrate, an end effector hand to which one side of the end effector in the first direction is connected, a horizontal moving portion coupled to the end effector hand and configured to move the end effector in the first direction, and a sagging detection unit having a light emitting unit and a light receiving unit respectively disposed on both sides of the moving path of the end effector, and sensing the sagging of the end effector.SELECTED DRAWING: Figure 1 【課題】エンドエフェクター（ｅｎｄ－ｅｆｆｅｃｔｏｒ）の垂れ下がりを感知する基板搬送装置及びこれを備える基板処理装置を提供すること。【解決手段】第１の方向に延び、基板が支持されるエンドエフェクターと、前記エンドエフェクターの前記第１の方向の一方の側が連結されるエンドエフェクターハンドと、前記エンドエフェクターハンドに連結され、前記エンドエフェクターを前記第１の方向に移動させる水平移動部と、前記エンドエフェクターの移動経路の両側にそれぞれ配置される発光部及び受光部を有し、前記エンドエフェクターの垂れ下がりを感知する垂れ下がり感知部と、を備える基板搬送装置。【選択図】図１