WASHING TOOL AND WASHING METHOD

To remove foreign matters by washing a chuck table having a holding surface with an annular recessed portion formed therein.SOLUTION: A washing tool for removing foreign matters from a holding surface of a chuck table that has a circular holding surface for holding a work piece and has an annular recessed portion formed in the holding surface, the recessed portion being curved from a center of the holding surface toward an outer periphery thereof, includes: a washing grindstone having on a bottom portion a washing surface having a projecting shape including a shape corresponding to a curved line extending from the center of the holding surface to a point on the outer periphery and along the recessed portion; and a moving unit that moves the washing grindstone in a raising/lowering direction orthogonal to the washing surface of the washing grindstone. Preferably, the tool further includes a rotary unit that rotates the washing grindstone around a rotation axis along the raising/lowering direction. Preferably, the washing surface is a circular surface having a diameter equal to or larger than a radius of the holding surface, and the projecting shape of the washing surface projects from the outer periphery of the circular surface toward a center thereof.SELECTED DRAWING: Figure 2 【課題】環状の凹部が形成された保持面を有するチャックテーブルを洗浄して異物を除去する。【解決手段】被加工物を保持する円形の保持面を有し、該保持面に環状の凹部が形成され、該凹部が該保持面の中心から外周にかけて湾曲したチャックテーブルの該保持面から異物を除去する洗浄工具であって、該保持面の該中心から該外周上の一点に至る該凹部に沿った曲線に対応した形状を含む凸形状を有する洗浄面を底部に備える洗浄砥石と、該洗浄砥石の該洗浄面と直交する昇降方向に該洗浄砥石を移動させる移動ユニットと、を備える。好ましくは、該昇降方向に沿った回転軸の周りに該洗浄砥石を回転させる回転ユニットを更に備える。また、好ましくは、該洗浄面は、該保持面の半径以上の直径を有する円形面であり、該洗浄面の該凸形状は、該円形面の外周から中心に向かって突出している。【選択図】図２