BIAXIALLY ORIENTED POLYESTER FILM FOR DRY FILM RESIST
To provide a biaxially oriented polyester film which is provided with slipperiness by keeping, within a prescribed range, the number of aggregates of particles or the number of protrusions each nucleated around a dust being contaminated in a film, which has excellent handleability, in which impedime...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a biaxially oriented polyester film which is provided with slipperiness by keeping, within a prescribed range, the number of aggregates of particles or the number of protrusions each nucleated around a dust being contaminated in a film, which has excellent handleability, in which impediment to light exposure is suppressed, and which can achieve formation of a resist having less defects.SOLUTION: A biaxially oriented polyester film for dry film resist contains one or more chemical elements selected from calcium, aluminum, antimony and silicon, and has 1 to 100/100 cm2 of foreign matters with outer diameters of 1.0 μm or more and 10.0 μm or less.SELECTED DRAWING: None
【課題】粒子の凝集物またはフィルム内に混入している異物を核とした突起の個数を所定の範囲とすることで、すべり性を付与しハンドリング性に優れた上で、露光阻害を抑制し、欠陥の少ないレジスト形成を達成することができる二軸配向ポリエステルフィルムを提供する。【解決手段】カルシウム、アルミニウム、アンチモン、シリコンから選ばれる1つ以上の元素を含有する、外径が1.0μm以上10.0μm以下の異物を1~100個/100cm2有するドライフィルムレジスト用二軸配向ポリエステルフィルム。【選択図】なし |
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