BATTERY ELECTRODE MANUFACTURING APPARATUS, CHAMBER INTERIOR CLEANING STRUCTURE, BATTERY ELECTRODE MANUFACTURING METHOD, AND CHAMBER INTERIOR CLEANING METHOD

To provide a battery electrode manufacturing apparatus, a chamber interior cleaning structure, a battery electrode manufacturing method, and a chamber interior cleaning method which are capable of manufacturing electrodes in an environment where cleanliness is appropriately ensured.SOLUTION: A battery electrode manufacturing apparatus 100 includes a chamber 110 in which the inside IN is evacuated below atmospheric pressure, an electrode forming portion 100A which is provided in the inside IN of the chamber 110 and supply a powdery active material 32A onto a base film 31A to form an electrode 30, an intake opening portion 141 through which air can be introduced from the outside OU of the chamber 110 to the inside IN, a regulating member 142 which is provided in the inside IN of the chamber 110 and regulates the flow of air from the intake opening portion 141 side to the electrode forming portion 100A side, and an exhaust device 143 for exhausting the air inside IN of the chamber 110.SELECTED DRAWING: Figure 2 【課題】清浄度を適正に確保した環境下で電極を製造することができる電池用電極製造装置、チャンバー内清浄構造、電池用電極製造方法、及び、チャンバー内清浄方法を提供することを目的とする。【解決手段】電池用電極製造装置１００は、内部ＩＮが大気圧よりも減圧されたチャンバー１１０と、チャンバー１１０の内部ＩＮに設けられ、基材フィルム３１Ａ上に粉体状の活物質３２Ａを供給して電極３０を形成する電極形成部１００Ａと、チャンバー１１０の外部ＯＵから内部ＩＮに空気を導入可能である吸入開口部１４１と、チャンバー１１０の内部ＩＮに設けられ、吸入開口部１４１側から電極形成部１００Ａ側への空気の流れを規制する規制部材１４２と、チャンバー１１０の内部ＩＮの空気を排気する排気装置１４３とを備える。【選択図】図２