TEMPERATURE MEASUREMENT DEVICE AND HEAT TREATMENT DEVICE
To provide a temperature measurement device capable of more accurately measuring ambient temperature inside a treatment tank even when the inside of the treatment tank is evacuated to cool a treatment target, and to provide a heat treatment device having the same.SOLUTION: A temperature measurement...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a temperature measurement device capable of more accurately measuring ambient temperature inside a treatment tank even when the inside of the treatment tank is evacuated to cool a treatment target, and to provide a heat treatment device having the same.SOLUTION: A temperature measurement device designed to be disposed inside a treatment tank for cooling a treatment target under reduced pressure to measure temperature inside the treatment tank under reduced pressure is provided, the temperature measurement device comprising a container containing water, a temperature sensor provided above the water surface inside the container, and a fluid supply unit configure to supply a fluid that promotes evaporation of the water inside the container.SELECTED DRAWING: Figure 2
【課題】処理対象物の冷却のために処理槽内を真空状態とした場合であっても、処理槽内の雰囲気温度をより正確に測定できる測温装置及びこの測温装置を備えた加熱処理装置を提供する。【解決手段】本発明は、処理対象物を減圧下で冷却する処理槽内に配置され、減圧下における該処理槽内の温度を測定する測温装置であって、水が収容される容器と、前記容器内の水面の上方に設けられる温度センサーと、前記容器内の水の蒸発を促進する流体を供給する流体供給部と、を備える。【選択図】図2 |
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