SUBSTRATE CASSETTE, SUBSTRATE IMMERSION PROCESSING APPARATUS USING SUBSTRATE CASSETTE, AND SOLAR CELL MANUFACTURING METHOD USING SUBSTRATE CASSETTE

To provide a substrate cassette capable of suppressing contact between substrates when taken out from a liquid even when the simultaneous processing amount is increased in a wet process.SOLUTION: A substrate cassette 100 for arranging a plurality of substrates W such that their main surfaces face ea...

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Bibliographische Detailangaben
1. Verfasser: ASATANI TSUYOSHI
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a substrate cassette capable of suppressing contact between substrates when taken out from a liquid even when the simultaneous processing amount is increased in a wet process.SOLUTION: A substrate cassette 100 for arranging a plurality of substrates W such that their main surfaces face each other and immersing the plurality of substrates W in a liquid at the same time, a plurality of substrate support portions 112 for supporting respective ends of the plurality of substrates W, a connecting portion 114 connecting the plurality of substrate supporting portions. In a case in which the interval between the plurality of substrates W when the plurality of substrates W are immersed in the liquid is D1, and the interval between the plurality of substrates W when the plurality of substrates W are taken out of the liquid is D2, the plurality of substrate support portions 112 are movable such that each interval between the plurality of substrates W satisfies the following relational expression (1). D1