GRANULAR MATERIAL FILM DEPOSITION SYSTEM

To provide a granular material film deposition system capable of efficiently taking the granular material subjected to film deposition in a vessel out of the vessel even when formed so as to extend a conveying path for conveying the granular material along the inner periphery of the vessel.SOLUTION: A granular material film deposition system 100 includes: a vessel 10 capable of storing a granular material F and having a conveying path 21 extended along the inner periphery of the vessel 10; a film deposition apparatus capable of depositing a film deposition material on the surface of the granular material F in the vessel 10; a carrying-out path 24 extended to the outside of the vessel 10 from the conveying path 21; and a vibration generator 30 for vibrating the vessel 10 so as to convey the granular material F in the vessel 10 toward the carrying-out path 24 along the conveying path 21 and carry the granular material F conveyed to the carrying-out path 24 out of the vessel 10 along the carrying-out path 24.SELECTED DRAWING: Figure 1 【課題】粉粒体を搬送するための搬送路が容器の内周に沿って延びるように形成されている場合であっても、容器内で成膜処理された粉粒体を容器の外に効率よく出すことが可能な粉粒体成膜システムを提供する。【解決手段】粉粒体成膜システム１００は、粉粒体Ｆを収容することが可能な容器１０であって当該容器１０の内周に沿って延びる搬送路２１を有する容器１０と、容器１０内において粉粒体Ｆの表面に成膜材料を成膜することが可能な成膜装置と、搬送路２１から容器１０の外に延びる搬出路２４と、容器１０内の粉粒体Ｆが搬送路２１に沿って搬出路２４に向かって搬送されるとともに搬出路２４に搬送された粉粒体Ｆが搬出路２４に沿って容器１０の外に搬出されるように容器１０を振動させる振動発生装置３０と、を備える。【選択図】図１