PRODUCTION METHOD OF ALUMINUM WIRES

To provide a production method of aluminum wires having high corrosion resistance even under a humid environment, and in particular a production method of aluminum wires having high corrosion resistance even to corrosion occurring when voltage is placed between neighboring two wires under a humid en...

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Bibliographische Detailangaben
1. Verfasser:	KAWAMATA YUKINAO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	To provide a production method of aluminum wires having high corrosion resistance even under a humid environment, and in particular a production method of aluminum wires having high corrosion resistance even to corrosion occurring when voltage is placed between neighboring two wires under a humid environment.SOLUTION: A production method of aluminum wires comprises the step of treating aluminum wires with a process liquid which contains a compound represented by the general formula in the figure and diphosphate of polyoxyethylene alkyl ether or triphosphate of polyoxyethylene alkyl ether.SELECTED DRAWING: None 【課題】高湿環境下においても高い防食性を有するアルミ配線の製造方法を提供する。特に、高湿環境下において隣接する２つの配線間に電圧が印加された場合に生じる腐食に対しても高い防食性を有するアルミ配線の製造方法を提供する。【解決手段】下記一般式で表わされる化合物および、ポリオキシエチレンアルキルエーテルのジリン酸エステルまたはポリオキシエチレンアルキルエーテルのトリリン酸エステルを含有する処理液でアルミ配線を処理する工程を有するアルミ配線の製造方法。JPEG2022133629000006.jpg25129【選択図】なし