ARTICLE ATTACHMENT MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND ARTICLE ATTACHMENT METHOD

To provide an article attachment mechanism, a substrate processing apparatus, and an article attachment method that facilitates the attachment and detachment of articles even when access directions are limited in a small area.SOLUTION: An attachment mechanism 90 for a valve unit 800 mounted in a substrate processing apparatus includes a support plate member 91 that supports a valve unit 800, and a base member 110 to which the support plate member 91 is detachably attached. The base member 110 includes a guide portion 92 having a guide surface 92a that guides the support plate member 91 in the planar direction, an insertion portion 93 arranged on the back side of the guide portion 92 and into which an end portion 91A on the back side of the support plate member 91 can be inserted in at least one planar direction, and a bolt 94 that fixes a front end portion 91B of the support plate member 91 inserted into the insertion portion 93.SELECTED DRAWING: Figure 8 【課題】狭小エリアにおいてアクセス方向が限られている場合であっても、物品を容易に着脱できる物品の取付機構、基板処理装置、物品の取付方法の提供。【解決手段】取付機構９０は、基板処理装置に搭載されるバルブユニット８００の取付機構９０であって、バルブユニット８００を支持する支持板部材９１と、支持板部材９１が着脱可能に取り付けられるベース部材１１０と、を備え、ベース部材１１０は、支持板部材９１を平面方向に案内するガイド面９２ａを有するガイド部９２と、ガイド部９２の奥側に配置され、支持板部材９１の奥側の端部９１Ａが平面方向の少なくとも一方向において差し込み可能な差込部９３と、差込部９３に挿し込まれた支持板部材９１の手前側の端部９１Ｂを固定するボルト９４と、を備える。【選択図】図８