HIGH-FREQUENCY CIRCUIT BOARD AND MANUFACTURING METHOD THEREOF
To provide a high-frequency circuit board that prevents cracks from occurring in the board at the edge of a wiring layer, prevents the wiring layer from peeling off from the board, and contributes to improved reliability, and a manufacturing method of the high-frequency circuit board.SOLUTION: A hig...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a high-frequency circuit board that prevents cracks from occurring in the board at the edge of a wiring layer, prevents the wiring layer from peeling off from the board, and contributes to improved reliability, and a manufacturing method of the high-frequency circuit board.SOLUTION: A high-frequency circuit board 1A includes a substrate 2 made of a material containing a dielectric or a semiconductor and having a first coefficient of linear expansion, a first wiring layer 3 having an edge portion 3E and formed on a first surface 2F of the substrate 2, and a first spacer 4 located in a region 3R not straddling the edge portion 3E of the first wiring layer 3 and having a second coefficient of linear expansion larger than the first coefficient of linear expansion.SELECTED DRAWING: Figure 1
【課題】配線層の縁部において基板にクラックが発生することを防止し、基板から配線層が剥離することを防止し、信頼性の向上に寄与する高周波回路基板と、この高周波回路基板を製造する製造方法とを提供する。【解決手段】高周波回路基板1Aは、誘電体又は半導体を含む材料で構成され、第1線膨張率を有する基板2と、縁部3Eを有するとともに基板2の第1面2F上に形成された第1配線層3と、第1配線層3の縁部3Eを跨がない領域3Rに位置し、前記第1線膨張率よりも大きい第2線膨張率を有する第1スペーサ4と、を備える。【選択図】図1 |
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