PIEZOELECTRIC VIBRATOR AND MANUFACTURING METHOD THEREOF
To provide a piezoelectric vibrator capable of ensuring conductivity between a base member and a piezoelectric vibration element via a conductive holding member, and a manufacturing method of the piezoelectric vibrator.SOLUTION: A piezoelectric vibrator includes a piezoelectric vibration element hav...
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Zusammenfassung: | To provide a piezoelectric vibrator capable of ensuring conductivity between a base member and a piezoelectric vibration element via a conductive holding member, and a manufacturing method of the piezoelectric vibrator.SOLUTION: A piezoelectric vibrator includes a piezoelectric vibration element having an excitation electrode and a connection electrode electrically connected to the excitation electrode, a base member having an electrode pad, a conductive holding member that connects the connection electrode and the electrode pad. The conductive holding member is a cured conductive adhesive. The conductive adhesive includes (A) an organopolysiloxane having two or more silicon-bonded alkenyl groups in one molecule, (B) an organopolysiloxane having two or more silicon atoms in one molecule and at least one hydrogen atom per silicon atom, and (C) a platinum catalyst with a compounding ratio of 15 ppm or more to the combined amount of (A) and (B), and the thickness of the metal layer on the surface of the electrode pad is 1.0 μm or less.SELECTED DRAWING: Figure 1
【課題】導電性保持部材を介したベース部材と圧電振動素子との導電性を確保することができる圧電振動子および圧電振動子の製造方法を提供する。【解決手段】励振電極と励振電極に電気的に接続された接続電極とを有する圧電振動素子と、電極パッドを有するベース部材と、接続電極と電極パッドとを接続する導電性保持部材と、を備え、導電性保持部材は、導電性接着剤の硬化物であり、導電性接着剤は、(A)1分子中に2個以上のケイ素原子に結合したアルケニル基を有するオルガノポリシロキサンと、(B)1分子中に2個以上のケイ素原子を有し、ケイ素原子1つに少なくとも1つの水素原子を有するオルガノポリシロキサンと、(C)(A)と(B)を合わせたものに対する配合比が15ppm以上である白金触媒と、を含み、電極パッドの表面における金属層の厚さは、1.0μm以下である。【選択図】図1 |
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